Semiconductor Manufacturing

Atlas Copco Vacuum Pump Solutions for Semiconductor Applications

GHS VSD⁺ Rotary Screw Vacuum Pump

The GHS VSD⁺ oil-lubricated rotary screw vacuum pump is a proven favorite in semiconductor fabs across the world. Its smart variable speed control and HEX@™ controller ensure:

• 🔄 Precise set-point vacuum control
• ⚡ Up to 50% energy savings
• 🧠 Intelligent logic-based operation
• 🔌 Plug-and-play Industry 4.0 integration
• 🌍 Low environmental footprint

With minimal oil carryover and advanced filtration options, the GHS VSD⁺ is ideal for remote installations in utility rooms, ensuring no contamination reaches sensitive production areas.

DZS VSD⁺ Dry Claw Vacuum Pumps – Oil-Free, Class 0 Option

Need dry vacuum for contamination-sensitive applications? The DZS VSD⁺ series delivers oil-free operation with:

• 🏭 Zero water and oil use
• 🔧 Easy maintenance and modular design
• 🧪 Ideal for dry processes, testing, and pick-and-place

This Class 0 certified vacuum pump is built for cleanroom-ready performance and reliable long-term operation.

LRP VSD⁺ Liquid Ring Vacuum Pumps

Our LRP VSD⁺ pumps are the go-to choice for moisture-rich or variable-load applications. With a compact footprint and low water usage, they offer dependable performance for secondary operations or humid environments within fab lines.

Benefits of Choosing Atlas Copco Vacuum Technology

✅ Stable Vacuum, Round the Clock

Unlike conventional fixed-speed pumps that degrade with environmental variation, Atlas Copco’s rotary screw and claw designs maintain stable vacuum across changing loads and temperatures—ensuring process continuity 24/7.

✅ Smart Connectivity for Industry 4.0

With the HEX@™ controller, Atlas Copco vacuum pumps integrate seamlessly into your fab’s smart systems. Features include:

• 📈 Real-time monitoring and alerts
• 🔧 Predictive maintenance
• 🖥️ Connectivity with SCADA/PLC systems
• 🛰️ Remote diagnostics

This digital integration ensures that your vacuum system not only supports, but enhances your factory’s automation and data-driven operations.

✅ Energy Recovery System

Atlas Copco vacuum solutions are designed for sustainable energy management. Up to 75% of energy used can be recovered as hot water without affecting pump performance—contributing to ISO 50001 and ISO 14001 compliance.

✅ Service Support You Can Trust

With access to Atlas Copco’s global service network, Victorian Utility Solutions offers full maintenance, repair, and commissioning support across India. Our certified vacuum experts ensure that your equipment runs efficiently with minimal downtime.

Tailored Vacuum Systems for Every Fab Size

Whether you’re a semiconductor startup or managing a full-scale foundry, we provide tailored vacuum solutions including:

• Centralized house vacuum systems
• Process-specific vacuum skids
• Modular pump combinations for redundancy
• Utility room installations for zero contamination
• Energy audits and life cycle cost optimization

Why Partner with Victorian Utility Solutions?

✅ Authorized Channel Partner of Atlas Copco
✅ India-based support and service
✅ Industry expertise across electronics, chips, and cleanroom applications
✅ Solutions for both greenfield and brownfield semiconductor plants
✅ Focus on energy efficiency, process uptime, and long-term ROI

Applications We Support

• Wafer fabrication and processing
• IC packaging and testing
• Pick-and-place systems
• Vacuum handling and assembly lines
• Cleanroom-compatible vacuum systems
• House vacuum networks

Let’s Talk About Your Semiconductor Project

Ready to scale your semiconductor operation with intelligent vacuum systems? Contact Victorian Utility Solutions today to schedule a consultation and explore the right Atlas Copco vacuum solution for your needs.

📞 Call us or 📩 submit your inquiry through our website. Let’s build the future of semiconductors—together.